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KMID : 0880220000380020099
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Journal of Microbiology
2000 Volume.38 No. 2 p.99 ~ p.104
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Monitoring and Characterization of Bacterial Contamination in a High-Purity Water System Used for Semiconductor Manufacturing
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Kim IS
Lee GH/Lee KJ
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Abstract
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KEYWORD
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Hydrogen peroxide, high-purity water system, bacterial contamination, resistance, biofilm
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